Myriad offers a number of innovative options to enahce your processing capabilities. Ehance your mask aligner with:

High Resolution (HRz) Enhancement Options

U.V. Exposure Systems & Power Supply Options

Optical Viewing Sytems

Tooling Options

High Resolution (HRz) Enhancement Option

Zeiss Optics

350 watt light source 350 watt U.V. power supply Zeiss optical viewing head Zeiss binocular Zeiss objectives Motor driven X-Y and Theta micrometer controls 1/8 micron step wafer stage resolution

 

 

U.V. Exposure Systems & Power Supply Options

Tamarack Light Source (high intensity upgrade) Constant Intensity Power Supply (with optical feedback) HA-5 Power Supply (with adjustable wattage) 350 Watt Power Supply (constant wattage) KP-3 Conversion (350 watt source cooling kit)

 

 

Optical Viewing Systems

Color Monitor Viewing System Tri-Op KVO Turret (includes additional set of split field objectives) Zeiss Binocular (resolution enhancement) Vari-Power Viewing (rotation transfer lens provides three different magnifications at each optical position IR Backside Alignment (mask align to metallized patterns on backside of wafers)

 

 

Tooling Options

Control Box

Autoload (cassette-to-cassette) Control Box (quickly and easily monitor and modify air pressure and vacuum controls Proximity Printing (extended mask life, eliminates bow and runout) Specialty Tools (a number of these are available, please inquire)